红外灯辅助喷雾热解法制备可控锑掺杂氧化锡透明热反射薄膜
收稿日期: 2015-12-08
修回日期: 2016-01-21
网络出版日期: 2016-06-27
基金资助
佛山市院市合作项目（2013HK100411）；
广东省重大科技专项（2013A011401010）
Fabrication of Transparent Heat Reflective Sb Controllable Doped SnO2 Thin Film via a Facile Infrared Lamp-assisted Spray Pyrolysis Method
Received date: 2015-12-08
Revised date: 2016-01-21
Online published: 2016-06-27
本文以乙二醇为溶剂及配位剂，以冰乙酸为酸性催化剂，采用溶胶−凝胶法制备均一稳定的具有不同锑掺杂浓度的二氧化锡（SnO2）溶胶，再通过红外灯辅助喷雾热解法制备性能优异的可控锑掺杂SnO2薄膜，并对薄膜微结构、光电性能进行表征。结果表明：薄膜以四方金红石结构存在，结晶完全；方阻值随锑掺杂浓度和成膜厚度的增加而降低；薄膜在可见光区的平均透过率可达79%左右，且在中远红外光区的平均反射率可达80%左右。此外，通过改变锑掺杂浓度和成膜厚度，能够有效地调节薄膜的红外反射率与反射起点波长，从而满足不同气候条件对热反射和热发射的不同要求。
关键词： 锑掺杂SnO2薄膜; 溶胶−凝胶法; 红外灯辅助喷雾热解法; 热反射薄膜
吴文泽 , 付一飞 , 凌春雷 , 庄发委 , 梁柱荣 , 徐得华 , 徐雪青 . 红外灯辅助喷雾热解法制备可控锑掺杂氧化锡透明热反射薄膜[J]. 新能源进展, 2016 , 4(3) : 240 -245 . DOI: 10.3969/j.issn.2095-560X.2016.03.012
Antimony-doped tin oxide (ATO) sol was prepared by using glacial acetic acid as acidic catalyst and ethylene glycol as ligand and solvent via sol-gel method, which was further utilized to fabricate high-quality Sb controllable doped ATO thin films using spray pyrolysis with an infrared lamp as the assistant heater. The structures, electrical and optical properties of these ATO thin films were systematically investigated. The X-ray diffraction (XRD) analysis revealed that the ATO thin films retained the tetragonal rutile structure with high crystallinity. The resistance of these thin films decreased with the increase of Sb doping level and film thickness. The average transmittance for the ATO thin films in visible range was about 79 %, and the average reflectance in the infrared range was about 80%. Furthermore, the infrared reflectance and emissivity of the thin film can be effectively adjusted by varying the Sb doping concentration and film thickness, which can meet the needs of different climatic conditions.
[1] 姜辛, 孙超, 洪瑞江, 等. 透明导电氧化物薄膜[M]. 北京: 高等教育出版社, 2008: 7-35.
[2] 吴春春, 杨辉, 陆文伟. Sol-gel法制备ATO透明导电薄膜[J]. 电子元件与材料, 2005, 24(3): 44-46. DOI: 10.3969/j.issn.1001-2028.2005.03.014.
[3] 郭玉忠, 王剑华, 黄瑞安, 等. 掺杂SnO2透明导电薄膜电学及光学性能研究[J]. 无机材料学报, 2002, 17(1): 131-138. DOI: 10.3321/j.issn:1000-324X.2002.01.022.
[4] 张君, 赵青南, 陈甲林, 等. 镀SiO2膜玻璃基片上SnO2: Sb薄膜的溶胶-凝胶法制备及表征[J]. 硅酸盐学报, 2005, 33(5): 553-558. DOI: 10.3321/j.issn:0454-5648. 2005.05.005.
[5] 殷海荣, 王昱, 陈福, 等. 溶胶-凝胶法制备SnO2: Sb光学薄膜[J]. 云南大学学报(自然科学版), 2005, 27(5A): 564-566.
[6] 侯环宇, 王正德, 李保卫. 喷雾热解法制备掺锑二氧化锡薄膜及其性能表征[J]. 内蒙古科技大学学报, 2008, 27(2): 137-139. DOI: 10.3969/j.issn.2095-2295. 2008.02.008.
[7] 陈甲林. 玻璃基SnO2: Sb透明导电薄膜的射频磁控溅射法制备及其光电性能研究[D]. 武汉: 武汉理工大学, 2005: 17-18.
[8] 周祥. APCVD法制备ATO薄膜及工艺参数对膜结构、性能影响的研究[D]. 武汉: 武汉理工大学, 2007: 25-27.
[9] 肖功利, 杨宏艳. 掺锑二氧化锡薄膜的喷雾热解法制备与热处理[J]. 半导体光电, 2008, 29(3): 357-360, 364.
[10] 赵倩, 徐雪青, 徐刚. 透明导电低辐射薄膜的低成本制备技术[J]. 材料研究与应用, 2013, 7(1): 6-10. DOI: 10.3969/j.issn.1673-9981.2013.01.002.
[11] 于长凤, 朱小平, 张脉官, 等. 电致发光用SnO2: Sb透明导电膜的制备及性能[J]. 中国陶瓷, 2006, 42(11): 18-20, 23. DOI: 10.3969/j.issn.1001-9642.2006.11.006.
[12] 王银玲, 徐雪青, 徐刚, 等. 锑掺杂纳米SnO2透明导电薄膜的制备与性能研究[J]. 光学仪器, 2008, 30(3): 68-72. DOI: 10.3969/j.issn.1005-5630.2008.03.017.
[13] 张聚宝, 侯春, 翁文剑, 等. 喷雾热解法制备SnO2: Sb透明导电薄膜[J]. 硅酸盐学报, 2003, 31(11): 1063-1068. DOI: 10.3321/j.issn:0454-5648.2003.11.009.
[14] ZHAO Q, XU X Q, XU G. High performance transparent conducting Sb-doped SnO2 films fabricated by spray pyrolysis[J]. Advanced materials research, 2013, 684: 85-89. DOI: 10.4028/www.scientific.net/AMR.684.85.
/
| 〈 |
|
〉 |
