磁控溅射法制备Si1−xGex/B多层薄膜及其热电性能研究
杜 鑫，苗 蕾，刘呈燕，王潇漾
Thermoelectric Property of Si1−xGex/B Multilayer Thin Film Prepared by Magnetron Sputtering
DU Xin, MIAO Lei, LIU Cheng-yan, WANG Xiao-yang
新能源进展
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2016, (5): 345
-350
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DOI: 10.3969/j.issn.2095-560X.2016.05.002
