Thermoelectric Property of Si1−xGex/B Multilayer Thin Film Prepared by Magnetron Sputtering

DU Xin, MIAO Lei, LIU Cheng-yan, WANG Xiao-yang

Advances in New and Renewable Energy ›› 2016, Vol. 4 ›› Issue (5) : 345-350.

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Advances in New and Renewable Energy ›› 2016, Vol. 4 ›› Issue (5) : 345-350. DOI: 10.3969/j.issn.2095-560X.2016.05.002

Thermoelectric Property of Si1−xGex/B Multilayer Thin Film Prepared by Magnetron Sputtering

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2016, 4(5): 345-350 https://doi.org/10.3969/j.issn.2095-560X.2016.05.002

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